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鎶�琛撴寚妯�
1銆佽几鍑哄鍔涳細 0锝�0.4Mpa 锛堝嚭寤犳檪涓�鑸ō瀹氱偤 0.3Mpa卤0.01Mpa锛�
2銆佽几鍑哄鍔涚┅(w臎n)瀹氭�э細 鈮ぢ�0.005Mpa
3銆佽几鍑烘祦閲忥細 TN-300H (0锝�320ml/min) TN-500H(0锝�520ml/min)
4銆佺磾搴︼細 99.999%
5銆侀瀹氬姛鐜囷細 150W(TN-300H) 200W(TN-500H)
6銆佸褰㈠昂瀵�(DxWxH)锛� 320脳 180脳350mm 閲嶉噺锛� 10KG
鍎�鍣ㄧ壒榛�
1銆佹搷浣滅啊鍠�锛� 鍙渶鎵撻枊闆绘簮闁嬮棞鍗冲彲鐢㈡矮锛� 杓稿嚭澹撳姏绌�(w臎n)瀹�,娴侀噺鐐烘暩(sh霉)瀛楁寚绀�锛� 閱掔洰鐩磋銆�
2銆佷娇鐢ㄦ柟渚�锛� 鏃ュ父宸ヤ綔鍙渶娣诲姞钂搁ぞ姘村嵆鍙�锛� 鍙�ｇ簩(x霉)宸ヤ綔锛� 涔熷彲闁撴柗宸ヤ綔锛� 涓旇几鍑虹┅(w臎n)瀹�銆�
3銆佸畨鍏ㄥ彲闈狅紝 鍎�鍣ㄥ叿鏈夐亷澹撲繚璀疯缃�锛� 姘ｈ矾绯荤当(t菕ng)瑷▓鐛ㄧ壒锛� 绲曠劇杩斿牽娑茬従(xi脿n)璞�锛� 閲囩敤闁嬮棞闆绘簮锛� 鎻愰珮 闆昏В鏁堢巼銆�